As semiconductor tools increase in capacity and complexity, some conventional motion control components won’t be able to keep pace. In this webinar, we’ll present examples of modern approaches to motion systems that can meet the semiconductor industry’s demanding requirements for accuracy, precision, reliability, size and cost.

We look first at the growing reliance on crossed roller bearings as a superior alternative to thin section bearings in next-generation wafer handling robots—which increasingly operate with more complex kinematics and higher loads than current models.

We also look at a compact direct drive positioning stage that can meet the stringent speed, accuracy, reliability and cleanliness requirements of semiconductor manufacturing.

Presenters:
Karl Wickenheisser, VP of Sales & Marketing, IKO
Yugi Ikeuchi, GM, Engineering & AppDevelopment, IKO