Finding a suitable motion component for semiconductor fabrication often involves trade-offs. That’s why it’s important to work with a motion specialist with both a wide variety of standard products as well as customization capabilities. Not only will they help guide you to the right standard motion component for semiconductor manufacturing equipment designs, they will also give you the flexibility to modify that component to the exact requirements of the application. This blog post will provide an overview of some typical motion components used for cutting-edge fabrication applications and the features that make them ideal for the semiconductor industry.

Standard Components for Semiconductor Manufacturing: An Overview
Here are some typical motion components along with their benefits, using IKO products as examples. With this information, you’ll be well-positioned to specify the best product for the application.

• Linear guides. Any application that requires precise positioning or involves transferring fragile and expensive wafers is well-suited for linear guides. Examples include wafer handling, inspection, photolithography, doping, etching, thin-film deposition, wafer dicing and ion implantation, to name a few. As a case in point, IKO’s ML Series linear motion rolling guides come standard in stainless steel and feature some of the smallest sizes in the industry. And, we offer many supplemental specifications and local modifications to further accommodate cleanroom and vacuum environments.
• Crossed roller bearings (CRBs). Designed to handle complex kinematic motion from all directions simultaneously, CRBs offer micron-level displacement with a compact footprint for wafer handling devices, including those that have long-reaching robotic arms with several pivoting joints. CRBs are available in high-rigidity configurations, can be made from stainless steel, and they can also be adapted for use in cleanrooms and modified to operate in vacuum environments. IKO’s CRBFV…A series is noteworthy, thanks to a special design with mounting holes around the inner and outer rings that simplify installation and create a low-cost, yet highly precise joint.
• Mechatronics. Positioning tables and stages effectively guide or position loads with micron precision in automated equipment used for wafer handling, inspection or picking and placing. Many compact units are available, such as IKO’s NT Series linear motor-driven table with a moving magnet design that keeps the height low and eliminates moving cables and cable carriers that can otherwise produce particles and increase thrust force requirements. Another option from IKO — the TC Series — satisfies the ISO Class 3 (U.S. Fed. Std. 209E Class 1) standard for cleanrooms. It combines light weight and a compact size with durable, corrosion-resistant aluminum and stainless steel construction, stainless steel coverings to prevent dust dispersal and a C-Lube built-in lubrication system. The TC series also features an internal magnet strip and threaded suction ports at either end of the actuator to contain and remove particles generated inside the enclosed actuator during operation.

Satisfy Stringent Semiconductor Industry Requirements
When a semiconductor fab design calls for high-quality bearings or mechatronics, look for a supplier that boasts a wide range of products, extensive engineering support and a history of customizing products for challenging applications. At IKO, we have a long history of providing high-quality motion components for semiconductor equipment applications, and we excel at creating custom versions of our products that satisfy the industry’s highly stringent requirements.

For more information, please visit www.ikont.com.