Industries

Semiconductor

Precision motion solutions for advanced semiconductor equipment

Precise, repeatable motion for shrinking scales

As chips shrink, semiconductor equipment requires faster, more precise motion. IKO repeatable linear guides and bearings enable high-speed cycles for wafer handling and pick and place machines. These high-performance components provide designers the reliability and flexibility needed for demanding fabrication environments.

The Right Component for Every Fabrication Stage

Our motion products meet the specialized needs of semiconductor manufacturing. Our linear motion guides come in rail sizes from 1 to 42 millimeters with four different bearing lengths, offering high accuracy for varied assembly requirements. For rotating applications, our compact crossed roller bearings deliver high rotational accuracy and handle radial, thrust and moment loads simultaneously, which is essential for orienting and installing parts at high speeds.

Engineered for Cleanrooms and Vacuums

Semiconductor fabrication involves some of the most challenging environments, including medium vacuum and cleanroom conditions. Many of our guides and bearings are available in stainless steel to prevent contamination and can be configured with specialized seals and coatings to protect against debris. To ensure purity, we can replace plastic components with stainless steel to meet the stringent requirements of sensitive processing areas.

Lubrication Built for Demanding Environments

For vacuum and cleanroom applications, IKO's proprietary Liquid Crystal Lubricant (LCL) outperforms traditional greases with exceptional cleanliness, durability, and resistance to outgassing, evaporation, and friction. It operates from 5°C to 100°C (peaks to 120°C) and is available standalone or integrated into our stainless steel linear guides and crossed roller bearings. For atmospheric applications, C-Lube technology delivers maintenance-free linear motion up to 20,000 km or five years — no re-greasing required.

Technical Advantages

Linear motion rolling guides deliver the rigidity and accuracy required for long-term repeatable performance.
Linear guides come in rail sizes from 1 to 42 mm with multiple bearing length options.
Compact crossed roller bearings manage radial, thrust and moment loads at once.
C-Lube technology achieves long-term, maintenance-free operation, which is vital for hard-to-access cleanroom or vacuum spaces.
Products are available with vacuum-compatible features and stainless steel construction for wet or sterile conditions.